Optical Inspection of Microsystems

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Wolfgang Osten - Optical Inspection of Microsystems
CRC | 2006 | ISBN: 0849336821 | Pages: 503 | PDF | 21 MB


Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands.

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Tags: Microsystems, Inspection, Optical
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