Nano-tribology and Materials in MEMS

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Nano-tribology and Materials in MEMS by Sujeet K. Sinha, N. Satyanarayana and Seh Chun Lim
English | ISBN: 3642369340 | 2013 | 410 pages | PDF | 11 MB

This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology.

Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.
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